48.LEYSPEC view 100

LEYSPEC view 100

Part number:

220010V01

Connection flange:

DN 40 CF

Detector type:

Faraday cup

Mass filter type:

QMS

Mass range (amu):

1-100

Max operating pressure:

1 x 10^-4 mbar

Max sensing temp:

120 °C

Min detectable partial pressure:

1 x 10^-10 mbar

Operating temp:

10 - 40 °C

Sensitivity:

1 x 10^-5 A/mbar