STPH301C

Inlet flange

ISO100K

Outlet port

KF40

Purge port

KF10

Water cooling fitting

PT1/4

Pumping Speed

 N₂

300 ls^-1

 H₂

200 ls^-1

Compression ratio

 N₂

>10⁸

 H₂

10³

Ultimate pressure with bake out heating

10^-7 Pa

(10^-9 Torr)

Max continuous outlet pressure

665 Pa

(5 Torr)

Max Nitrogen throughput

2500 sccm

Rated speed

48000 rpm

Starting time

4 min

Max inlet flange temperature

120 °C

Input voltage

100 to 120 (± 10) V a.c. or

200 to 240 (± 10) V a.c.

Power consumption

0.6 kVA

Pump weight

15 kg

Controller weight

9 kg