STP-XA3203C

Inlet flange

ISO320F

Pumping Speed

  N₂

3200 ls^-1

  H₂

2300 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

>6 x 10³

Ultimate pressure

10^-7 Pa

Max allowable backing pressure

266 Pa

Max allowable gas flow

N₂ (water cooled)

2300 sccm

(3.8 Pam³s^-1)

Ar (water cooled)

1900 sccm

(3.2 Pam³s^-1)

Rated speed

27500 rpm

Starting time

8 min

Mounting position

Any orientation

Water cooling

Flow

3 lmin^-1

Temperature

5-25 °C (41-77 °F)

Pressure

0.3 MPa

Recommended purge gas flow

50 sccm

(8.4 x 10^-2 Pam³s^-1)

Input voltage

200 to 240 (± 10) V a.c.

Power consumption

1.5 kVA

Pump weight

80 kg (176 lb)

Controller weight

12 kg (26.4 lb)