STP-XA2703C

Inlet flange

VG250

Pumping Speed

  N₂

2650 ls^-1

  H₂

2050 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

>6 x 10³

Ultimate pressure

10^-7 Pa

Max allowable backing pressure

266 Pa

Max allowable gas flow

N₂ (water cooled)

2300 sccm

(3.8 Pam³s^-1)

Ar (water cooled)

1900 sccm

(3.2 Pam³s^-1)

Rated speed

27500 rpm

Starting time

8 min

Mounting position

Any orientation

Water cooling Flow

3 lmin^-1

Water cooling Temperature

5-25 °C (41-77 °F)

Pressure

0.3 MPa

Recommended purge gas flow

50 sccm (8.4 x 10^-2 Pam³s^-1)

Input voltage

200 to 240 V a.c. (± 10)

Power consumption

1.5 kVA

Pump weight

75 kg (165 lb)

Controller weight

12 kg (26.4 lb)