STPA1303C

Inlet flange

ISO200F

Outlet port

KF40

Purge port

KF10

Water cooling fitting

PT1/4

Pumping Speed

  N₂

1300 ls^-1

  H₂

800 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

10³

Ultimate pressure with bake out heating

10^-7 Pa

(10^-9 Torr)

Maximum continuous outlet pressure *

270 Pa

(2 Torr)

Maximum Nitrogen throughput *

1500 sccm

Rated speed

32500 rpm

Starting time

7 min

Maximum inlet flange temperature

120 °C

Input voltage

200 to 240 (± 10) V a.c.

Power consumption

0.85 kVA

Pump weight

39 kg

Controller weight

9 kg