STPA803C

Inlet flange

ISO160F

Outlet port

KF40

Purge port

KF10

Water cooling fitting

PT1/4

Pumping Speed

  N₂

800 ls^-1

  H₂

520 ls^-1

Compression ratio

  N₂

>10⁸

  H₂

10³

Ultimate pressure with bake out heating

10^-7 Pa (10^-9 Torr)

Max continuous outlet pressure

270 Pa (2 Torr)

Max Nitrogen throughput

1500 sccm

Rated speed

32500 rpm

Starting time

7 min

Max inlet flange temperature

120 °C

Input voltage

200 to 240 (± 10) V a.c.

Power consumption

0.85 kVA

Pump weight

39 kg

Controller weight

9 kg